A Practical OEM Checklist for Specifying a Wafer Heater

https://thermal-solutions-journal.swiftnestly.com/posts/semiconductor-heater-selection-checklist-for-equipment-manufacturers

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result